JPH0349218U - - Google Patents
Info
- Publication number
- JPH0349218U JPH0349218U JP10990689U JP10990689U JPH0349218U JP H0349218 U JPH0349218 U JP H0349218U JP 10990689 U JP10990689 U JP 10990689U JP 10990689 U JP10990689 U JP 10990689U JP H0349218 U JPH0349218 U JP H0349218U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- transport mechanism
- manufacturing apparatus
- semiconductor
- deterioration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 230000006866 deterioration Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000007723 transport mechanism Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Automatic Assembly (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10990689U JPH0349218U (en]) | 1989-09-19 | 1989-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10990689U JPH0349218U (en]) | 1989-09-19 | 1989-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0349218U true JPH0349218U (en]) | 1991-05-14 |
Family
ID=31658465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10990689U Pending JPH0349218U (en]) | 1989-09-19 | 1989-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0349218U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232218A (ja) * | 2007-03-19 | 2008-10-02 | Pascal Engineering Corp | アクチュエータ、アクチュエータを備えたアンクランプ装置および加工装置 |
-
1989
- 1989-09-19 JP JP10990689U patent/JPH0349218U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232218A (ja) * | 2007-03-19 | 2008-10-02 | Pascal Engineering Corp | アクチュエータ、アクチュエータを備えたアンクランプ装置および加工装置 |